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Wet Processing

Felcon Wet Processing

The semiconductor industry relies heavily on wet processing products and equipment to carry out essential manufacturing steps such as cleaning, etching, and developing photoresist layers. These processes require precise control of temperature, concentration, and agitation using liquid chemicals to achieve the desired results, which ultimately contribute to the production of high-quality electronic devices.

The key wet processing equipment used in the industry include wet benches, chemical baths, spin processors, and rinse systems.

Felcon equipment offers a dedicated work area for manual, semi-automated, or automated wet processing, providing a clean and controlled environment. Chemical baths are used for immersion processes, such as etching or cleaning, where the substrate is submerged in a specific chemical solution.

At Felcon, wet processing equipment is manufactured using high-quality white fire retarding polypropylene or FM Approved Thermoplastics for acid and Inorganic based processes, and 304/316-grade stainless steel for Organic solvent-based processes. All materials are carefully selected to ensure suitability for use in the most demanding conditions and are suitable for all Clean Room applications.

Felcon wet processing equipment is designed to be compatible with all types of cleanrooms and can also incorporate Laminar Air Flow with HEPA/ULPA filters.

With over 55 years of experience in wet processing, Felcon is a trusted expert in the field.

Modular WEt Bench

Wet Processing equipment

Main Features:

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Manual and Semi-Automatic Wet Benches Wet Benches

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Chemical Supply & Drainage Systems

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Fire Detection & Suppression incorporated to the wet stations

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Ambient process baths, hight temperature process baths, ultra- mega-sonic baths, recirculation and filtration systems, and many other available options and solutions

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Spin Rinser Dryers

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Tube Washers & Parts Cleaning

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Standard units and fully custom designed units

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“Cleanroom Grade” surface finish

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HEPA, ULPA, Carbon filtration available

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Specialist software

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Many available options

Tube Washes and Parts Cleaning